| 摘要 |
PURPOSE:To prevent the deterioration of the water quality by delivering the distilled water produced in a condenser by the pressure of an inert gas to prevent the generation of fine particles in the transfer of distilled water in the title distillation device for producing ultra-pure water. CONSTITUTION:The raw water is subjected to ion-exchange or reverseosmosis membrane treatment, and then heated by a heater 2 and evaporated in an evaporator 1. The steam is sent to the condenser 3 through a pipe 11, and condensed therein by a cooling pipe 6 to produce ultra-pure water. The produced ultrapure water is stored in a distilled water storage 8 at the lower part of the condenser 3, and then supplied to a s use point from a distilled water feed pipe 12 by the pressure of an inert gas (N2, He, Ar, etc.) supplied from a compressed gas feed pipe 13 connected to a compressed gas source 14 provided above the condenser 3. Since a pump is not used for delivering ultrapure water, the deterioration of the water quality due to the fine particles generated from the pump can be prevented.
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