| 摘要 |
PURPOSE:To stabilize discharge at high repetion rate and therefore to obtain stable pulse laser oscillation by a method wherein a supporting body, which is provided with a pair of electrodes at either end of it, is formed with substance which forms a conductive layer on a surface layer through discharge between the electrodes. CONSTITUTION:An opposite electrode 1, which is one of primary electrodes, and an electrode structure 2 facing the electrode 1, which is the other of the primary electrodes, are both provided in an airtight vessel 3 in which a gas laser medium is sealed. The structure 2 consists of a supporting body 4 of Al nitride, a pair of electrodes 5 and 6 provided at both ends of the supporting body 4, and a conductor 7 bonded onto the rear of the supporting body 4, which is electrically connected to the electrode 5. Hereupon, an electrical conductor is formed into a chain form on the surface of the supporting body between the electrodes 5 and 6. In this structure, discharge being performed, a large current plasma develops, which evaporates and dissolves the surface layer of the supporting body for the formation of Al on the surface layer. Thereby, a discharge section 20 is constituted with the electrode 1 and the supporting body 4, where a primary discharge is generated so as to emit a laser beam. |
