| 摘要 |
PURPOSE:To effect the exposure treatment by many kinds of mask patterns using a single exposure mask by composing the exposure mask from a liquid crystal panel. CONSTITUTION:The exposure mask 4 is composed of the liquid crystal panel. A horizontal electrode group 5 and a vertical electrode group 6 having translucent property respectively are formed on the counter surfaces of two sheets of glass panels 1, 1 which are parallel to each other. And, a liquid crystal 7 is enclosed between the both electrode groups 5, 6 to form a cell provided with matrix like electrode pattern. The mask pattern can be changed freely by controlling control voltage applied from outside. Thus, the all steps and forms which are required to a photomechanical process can be coped with the single exposure mask. |
