发明名称 INSTRUMENT FOR MEASURING DUST
摘要 PURPOSE:To prevent sticking of dust in a gas sampling pipe and to make exact measurement by providing a destaticizing device around said pipe. CONSTITUTION:Cleaned air is blown by a blower 12 through an introducing piping 13 and a filter 14 into a material 11 to be measured in a measuring chamber 10. The air including the dust generated from the material 11 is discharged through a bell mouse reducer 15 to a discharge piping 16. Part of the air in the piping 16 is sampled by the sampling pipe 3 and the concn. of the dust is counted by a measuring instrument 2. The destaticizer 4 is provided around the sampling pipe 3 so that the static electricity in the sampling pipe is removed. Then, the dust is no longer stuck to the inside of the pipe and the measurement is exactly carried out.
申请公布号 JPS63208742(A) 申请公布日期 1988.08.30
申请号 JP19870042389 申请日期 1987.02.25
申请人 TOKYO ELECTRON LTD;TAISEI CORP 发明人 MATSUO TAKENOBU;YAMAGUCHI TOMOZO;FUKAO HITOSHI;IMAFUKU MASAYUKI
分类号 G01N15/14;F16L55/00;G01N1/00;G01N1/02;G01N15/00;G01N15/06;G01N15/10 主分类号 G01N15/14
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