发明名称 |
INSTRUMENT FOR MEASURING DUST |
摘要 |
PURPOSE:To prevent sticking of dust in a gas sampling pipe and to make exact measurement by providing a destaticizing device around said pipe. CONSTITUTION:Cleaned air is blown by a blower 12 through an introducing piping 13 and a filter 14 into a material 11 to be measured in a measuring chamber 10. The air including the dust generated from the material 11 is discharged through a bell mouse reducer 15 to a discharge piping 16. Part of the air in the piping 16 is sampled by the sampling pipe 3 and the concn. of the dust is counted by a measuring instrument 2. The destaticizer 4 is provided around the sampling pipe 3 so that the static electricity in the sampling pipe is removed. Then, the dust is no longer stuck to the inside of the pipe and the measurement is exactly carried out.
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申请公布号 |
JPS63208742(A) |
申请公布日期 |
1988.08.30 |
申请号 |
JP19870042389 |
申请日期 |
1987.02.25 |
申请人 |
TOKYO ELECTRON LTD;TAISEI CORP |
发明人 |
MATSUO TAKENOBU;YAMAGUCHI TOMOZO;FUKAO HITOSHI;IMAFUKU MASAYUKI |
分类号 |
G01N15/14;F16L55/00;G01N1/00;G01N1/02;G01N15/00;G01N15/06;G01N15/10 |
主分类号 |
G01N15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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