| 摘要 |
PURPOSE:To increase luminous spectral output of magnesium in the wavelength range of 220 nm to 330 nm which is effective for hardening of a resist by making mercury, magnesium, halogen, and an inert gas be sealed in a luminous tube and further making tin and bismuth be sealed in it so as to serve as promoters which make magnesium become luminous. CONSTITUTION:In a metallic vapor discharge lamp in which mercury, magnesium, halogen, and inert gas are sealed in a luminous tube, at least one or more species of tin and bismuth are sealed so as to serve as promoters which make magnesium become luminous. Therefore, though magnesium is hard to become luminous as an single element, it becomes much luminous by its interactions of tin and bismuth so that it has a high energy distribution in a wavelength range effective for hardening of a resist. The amount of addition of tin and bismuth is allowed to be minute, that is, for example, the addition of 2 to 5X10<-8> mol per inner volume 1cc in the luminous tube exerts sufficiently large effects. Hence, ultraviolet rays in the effective wavelength region of 220 nm to 330 nm can be made to become luminous with high efficiency.
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