| 摘要 |
PURPOSE:To stabilize recording characteristics and to improve the reliability, by placing an insulating film between a heating element layer and a conductive power conduction layer. CONSTITUTION:In a thermal head, a heating element layer 12 of Ta2N, an insulating film 16 having the thickness of 50-1000Angstrom and formed from at least one selected from the group of Al2O3, SiO2, Ta2O5, BN, Si3N4, AlN, SiAlON, TiC, SiC, MgO, a power supply conductive layer 13 composed of Al, an anti- oxidation layer 14 of SiO2 and an anti-abrasion layer 15 of TaOx are laminated secuentially onto an alumina substrate 11. The power supply conductive layer 13 is patterned into an individual electrode and a common electrode, and a heating dot section 17 is provided between them. When an insulating film 16 is formed between the heating element layer 12 and the power supply conductive layer 13, the heating element can be controlled easily to have proper resistance of 100-500OMEGA and heating value per unit volume is reduced, resulting in a uniform temperature distribution at the heating dot section and stabilization of recording characteristics. |
