摘要 |
PURPOSE:To obtain a necessary resistance value without spreading an area in a section requiring a resistor while reducing wiring delay in other sections except the section requiring the resistor by using polysilicon for the section needing the resistor and a polycide in the other sections except the section needing the resistor. CONSTITUTION:7 represents a polysilicon wiring arranged with the object of the constitution of a resistor. A metallic silicide layer corresponding to 7b is not laminated to the polysilicon wiring section. Accordingly, only polysilicon is employed for a section requiring the resistor and a polycide for sections except the section requiring the resistor, thus acquiring a resistance value without extending an area in the section needing the resistor, then reducing wiring delay in other sections except the section requiring the resistor.
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