| 摘要 |
PURPOSE:To make the heat generating part of a thermal head into high density by first forming a resistor and an electric conductor continuously on a substrate, then forming a resist pattern thereon, and etching the electric conductor and resistor and finally removing the electric conductor located on the heating part. CONSTITUTION:A heat accumulation layer of glass is formed on a substrate 1 and the substrate 1 is washed. After this, the substrate is set on a sputtering device to sputter the resistor 3 and electric conductor 4 sequentially. For the resistor 3, Ta2N, Ta-SiO2, etc., are used. The electric conductor 4 is composed of two layers, that is, a foundation 5 of Cr or Ni-Cr as a lower one and a mask pattern 7 formed by the formation of an electric conduction film 6 through the sputtering of Cu or Al on the foundation and making a positive photoresist film by a coating method. After this, the electric conductor 4 and resistor 3 of the remaining part are removed to form a mask pattern through the etching of the resistor 3. At the same time, the electric conductor 4 in the part in which an opening is provided, is removed to allow the resistor 3 to be exposed. Then the electric conductor 4 is formed into a drive electrode 4A and a common electrode 4B, thus forming a heat generating part 9. |
