发明名称 METHOD AND DEVICE FOR LASER MARKING
摘要 PURPOSE:To improve the throughput of marking by scanning plural laser beams to simultaneously mark plural objects. CONSTITUTION:Marking objects 6 are continuously carried at a prescribed pitch by a carrying device to bring marking objects 61 and 62 to irradiation positions of laser beams 41 and 42. These laser beams 41 and 42 are two- dimensionally scanned on marking surfaces of objects 61 and 62 by reflection mirrors 51 and 52 to simultaneously mark objects. In this case, surface temperatures of marking surfaces in parts irradiated with laser beams 41 and 42 momently rise and surface layers in these parts are fused away, and a mark ing pattern 8 having the same shape as the drawing pattern of laser beams 41 and 42 is formed on surfaces of marking objects 61 and 62. Thus, the through put of marking is improved.
申请公布号 JPS63175818(A) 申请公布日期 1988.07.20
申请号 JP19870005968 申请日期 1987.01.16
申请人 HITACHI LTD 发明人 KASHIMURA NOBORU;NISHIZUKA HIROSHI;WAKIYAMA FUMITOSHI;MIMATA TSUTOMU;FUJIOKA SHUNICHIRO
分类号 G02B26/10;H01L21/02;H01L23/00 主分类号 G02B26/10
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