| 摘要 |
PURPOSE:To enable ion beam exposure of high productivity by transmitting an accelerating plasma surface source flow or an accelerating ion surface source flow through a crystal mask surface and hence forming an illustrated ion beam gun. CONSTITUTION:Hydrogen gases are made to flow between high-frequency electrode plates to which a high-frequency voltage is applied from a high-frequency power source 1, so that plasma 3 is generated. The plasma 3 is ionized by a high voltage electrode plate 5 to which a high voltage is applied from a high voltage power source 4. Accelerated ions 7 are transmitted through a single-crystal mask 6 made of Si single crystal or the like, so that an illustrated ion beam surface source can be generated.
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