发明名称 Group III-V semiconductor electrical contact
摘要 A layer of an amphoteric dopant on the surface of a group III-V intermetallic semiconductor crystal will diffuse into the crystal surface in a heating cycle forming a stable contact. The contact can be ohmic or rectifying depending on the localized presence of an excess of one crystal ingredient. A layer of Si on GaAs upon heating forms a rectifying contact. When the layer of Si contains As, the contact is ohmic.
申请公布号 US4757369(A) 申请公布日期 1988.07.12
申请号 US19870060700 申请日期 1987.06.10
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 JACKSON, THOMAS N.;KIRCHNER, PETER D.;PETTIT, GEORGE D.;RUTZ, RICHARD F.;WOODALL, JERRY M.
分类号 H01L21/338;H01L21/28;H01L21/285;H01L29/41;H01L29/43;H01L29/45;H01L29/80;H01L29/812;(IPC1-7):H01L29/167;H01L23/48;H01L29/161;H01L29/62 主分类号 H01L21/338
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