| 摘要 |
PURPOSE:To minimize the delay time and the rise time of a laser beam output by a method wherein a trigger discharge source is applied to a trigger discharge electrode synchronizing with a pulse source applied to a main discharge electrode. CONSTITUTION:On the side of a trigger discharge source controller, a pulse signal 32 for a DC source control circuit 25 is inputted to a single shot circuit 28 and a pulse which is synchronized with the rise timing of the pulse signal 32 is given to a switch driving circuit 29. The switch driving circuit 29 receives the pulse signal from the single shot circuit 28 and gives a switch driving signal 35 to a switch 30. The switch 30 is turned ON and OFF by the switch driving signal 35 and applies a trigger discharge current 36 synchronizing with the rise timing of a main discharge current 34 between a trigger discharge electrode 24 and an anode 22. Therefore, the main discharge current 34 and the trigger discharge current 36 are applied to the respective discharge electrodes of a discharge part 21 at the rise timing T of the input pulse signal 32 so that the glow discharge in the discharge part 21 can be induced quickly. |
