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发明名称
摘要
申请公布号
JPS63102769(U)
申请公布日期
1988.07.04
申请号
JP19860196080U
申请日期
1986.12.19
申请人
发明人
分类号
C30B25/12;C30B29/40;H01L21/205;(IPC1-7):C30B25/12
主分类号
C30B25/12
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