| 摘要 |
PURPOSE:To improve the durability and corrosion resistance of a magnetic disk by disposing a protective layer consisting of silicon, nitrogen, oxygen, and carbon by plasma CVD a magnetic layer. CONSTITUTION:The protective layer 4 consisting of the silicon, nitrogen, oxygen, and carbon is formed by plasma CVD atop the magnetic layer 3. The compsn. of the protective layer 4 consists, by atomic ratio, preferably of 2.5-3.5 silicon, 3.0-5.0 nitrogen, 1.0-3.0 oxygen, and 0.5-1.5 carbon. The compsn. ratio of the silicon and nitrogen in particular is preferably confined to 3:4. A lubricating layer 5 consisting of a fluorinated oil, for example, fluorinated oil having a =CO group or -COOH group is preferably disposed further on the protective layer 4. The magnetic disk having such constitution hardly causes the wear of the magnetic layer 3 in sliding with a magnetic head and has excellent durability. A protective function is sufficiently provided by the protective layer 4 consisting of a silicon oxide system, by which the corrosion resistance is enhanced.
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