发明名称 |
Movable core fast cool-down furnace |
摘要 |
One fast cool-down furnace embodiment discloses a double wall in the interspace of which a cooling air stream is flowable to provide fast cool-down of a load of wafers. The double wall embodiment is retrofittable on existing diffusion furnace, and includes a cylindrical member aligned in concentric relation with the diffusion tube by combination plenum defining and supporting manifolds. In a second embodiment, the fast cool-down furnace includes a reaction vessel and a heating core relatively movable relative to each other in such a way that in a fast cool-down condition the core and reaction vessel are spaced apart. Cooling tubes are embedded in the movable core. Fans or other aids to cooling are provided. Operation is either in a controlled cool-down mode or in a quick quench mode.
|
申请公布号 |
US4753192(A) |
申请公布日期 |
1988.06.28 |
申请号 |
US19870001445 |
申请日期 |
1987.01.08 |
申请人 |
BTU ENGINEERING CORPORATION |
发明人 |
GOLDSMITH, FOREST S.;WAUGH, ARTHUR |
分类号 |
C23C8/00;C30B31/10;F27B17/00;F27D9/00;F27D19/00;(IPC1-7):C23C8/00 |
主分类号 |
C23C8/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|