| 摘要 |
PURPOSE:To enhance the reliability of an inspection system and to lengthen the life of a light-emitting element for display use by a method wherein a light-emitting display device used to display an operating state of a semiconductor inspection system is equipped with a control function to switch a display on and off and the display is prohibited when it is not required. CONSTITUTION:When an operating state is to be displayed, a changeover switch 3 is set to the ON state on the basis of a command for display use. When signal lines 2 are in the ON state after the setting operation, the potentials on both ends of light- emitting diodes 1 become equal and the light-emitting diodes 1 are turned off. On the other hand, when the signal lines 2 are in the OFF state, a forward bias is injected into the light-emitting diodes 1 and the light-emitting diodes 1 are lighted. When the function of a semiconductor is inspected, the changeover switch 3 is turned off on the basis of a command for function test use. The light-emitting diodes 1 are turned off irrespective of the state of the signal lines 2, and the function of the semiconductor can be inspected accurately. The changeover switch 3 is not limited to a manually operated mechanical switch, and a relay or a semiconductor element for switching use can be used. In the latter case, it is possible to automatically turn on and off the display by means of an information-processing system. |
