PRODUCTION OF ELECTRICALLY CONDUCTIVE TRANSPARENT FILM

摘要

PURPOSE:To obtain a stable compsn. of a film by feeding a flow of a gaseous mixture contg. a gaseous tin compd. and gaseous oxygen as essential components in contact with the surface of a base material and by radiating laser beams in two steps so as to strictly control the heating temp. CONSTITUTION:A flow 14 of a gaseous mixture contg. a gaseous tin compd. 9 and gaseous oxygen 10 as essential components is fed in contact with the surface of a base material 5. First laser beams 12 generated from a first laser beam generator 1 are radiated on the surface of the base material 5 to preheat the surface. Second laser beams 15 are then radiated on the preheated surface of the base material 5 and a tin oxide film is formed on the surface of the base material 5.