| 摘要 |
PURPOSE:To shorten the processing time for drying a wafer sharply by installing a gas inlet at a drier for the wafer. CONSTITUTION:A flexible pipe 10 for the introduction of air, to be used for an introduction route to supply heated and clean air, is connected to an air inlet 4 at a lid 1a of a drier for a semiconductor wafer; a heating means 11, a filter 12 and the like are attached to the upstream side/of this pipe 10. In addition, a fan 13 is installed. Through this constitution, it is possible to feed the heated and clean air to the inside of a drier main unit 1, to promote the drying process of the wafer and to shorten the processing time for drying the wafer.
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