| 发明名称 |
Glow discharge method and apparatus and photoreceptor devices made therewith |
| 摘要 |
Glow discharge method and apparatus useful for coating photoresponsive devices in the form of drums and plates are described. Improved photoresponsive devices using amorphous silicon which accepts a high surface voltage in the dark and discharges to a low residual voltage under illumination are also described.
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| 申请公布号 |
US4741801(A) |
申请公布日期 |
1988.05.03 |
| 申请号 |
US19860827022 |
申请日期 |
1986.02.07 |
| 申请人 |
PLASMA PHYSICS CORP. |
发明人 |
COLEMAN, JOHN H. |
| 分类号 |
C23C16/50;G02F1/135;G03G5/082;(IPC1-7):B44C1/22;B05D3/06;G03G15/00;H01L21/306 |
主分类号 |
C23C16/50 |
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