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发明名称
QUARTZ VACUUM CHAMBER BASE FOR A CHEMICAL VAPOR DEPOSITION APPARATUS
摘要
申请公布号
IL83315(A)
申请公布日期
1988.04.29
申请号
IL19840083315
申请日期
1984.08.29
申请人
ANICON, INC.
发明人
分类号
C23C16/52;(IPC1-7):C23C16/52
主分类号
C23C16/52
代理机构
代理人
主权项
地址
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