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发明名称
APPARATUS FOR PRODUCTION OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
EP0177194(A3)
申请公布日期
1988.04.20
申请号
EP19850306325
申请日期
1985.09.05
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
KOMEYA, KATSUTOSHI;TSUGE, AKIHIKO;NAKANISHI, MASAE;WATANABE, MASAYUKI;WASHIZUKA, SHIYOUICHI;YASKIRO, SADAO
分类号
C30B15/10;C30B15/14;(IPC1-7):C30B15/10
主分类号
C30B15/10
代理机构
代理人
主权项
地址
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