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发明名称
VAPOR GROWTH METHOD
摘要
申请公布号
JPS6377108(A)
申请公布日期
1988.04.07
申请号
JP19860223056
申请日期
1986.09.19
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKAHASHI YASUHITO;OGURA MOTOTSUGU
分类号
H01L21/20;H01L21/205;H01L21/263
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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