发明名称 Composite structure for focal plane array to compensate deformation
摘要 <p>A focal plane array (FPA) mounted in an imbalanced configuration including several layers of materials with differing thermal expansion coefficients (TECs), moduli of elasticity, and thicknesses to maintain surface planarity and improve the reliability of the FPA during thermal cycling and excursions. An optical substrate is coupled to a multiplexer through an array of indium bumps. The typical TEC mismatch between the optical substrate and the multiplexer is eliminated by forcing the multiplexer to exhibit an effective TEC equal to that of the optical substrate by particularly selecting the types of materials used and the thicknesses of the individual layers of the composite structure. Consequently, undesirable deflections and distortion of the multiplexer and the indium bumps are minimized, thereby substantially improving FPA reliability. &lt;IMAGE&gt;</p>
申请公布号 EP0831533(A1) 申请公布日期 1998.03.25
申请号 EP19960114825 申请日期 1996.09.16
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 ASATOURIAN, ROLIN K.
分类号 H01L27/146;(IPC1-7):H01L27/146 主分类号 H01L27/146
代理机构 代理人
主权项
地址
您可能感兴趣的专利