发明名称 FILM FORMING METHOD
摘要 PURPOSE:To form a pattern without causing destruction and erosion of a film by developing a film forming molecule in a patternlike shape on liquid surface and shifting this patternlike film forming molecule to form the pattern on a support. CONSTITUTION:For example, two kinds of film forming molecules are used and one of which is a molecule (this is defined as a molecule A) showing insulation properties for arachidin or the like and the other a molecule (this is defined as a molecule B) showing electrical conductivity for tetracyanoxymethan docosylpyridinium or the like and these two kinds of molecules are alternately developed in the order of A, B, A, B on liquid 5. After forming unimolecular films (a), (b) consisting of molecules A, B in stripe-shape (a1, b1, a2, b2) respectively on the liquid surface 5, a base plate 7 is vertically moved so as to cross the liquid surface 5 and a stripe-shaped distributing pattern is formed on the base plate 7 by shifting them intact.
申请公布号 JPS6362542(A) 申请公布日期 1988.03.18
申请号 JP19860203598 申请日期 1986.09.01
申请人 CANON INC 发明人 KAWADA HARUNORI;TAKIMOTO KIYOSHI;SAITO KENJI;MIYAZAKI TOSHIHIKO;EGUCHI TAKESHI;KIMURA TOSHIAKI
分类号 B01J19/00;B05D1/20;H01L51/05;H01L51/40 主分类号 B01J19/00
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