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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6362329(A)
申请公布日期
1988.03.18
申请号
JP19860208184
申请日期
1986.09.03
申请人
NEC CORP
发明人
SAKAI TATSURO
分类号
H01L21/304;H01L21/205;H01L21/302;H01L21/306
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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