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发明名称
LASER ANNEALING METHOD
摘要
申请公布号
JPS6340791(A)
申请公布日期
1988.02.22
申请号
JP19860183053
申请日期
1986.08.04
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
OKAMOTO AKIO;SHIRAI SEIICHI;SERIKAWA TADASHI
分类号
C30B1/08;C30B29/06;H01L21/324
主分类号
C30B1/08
代理机构
代理人
主权项
地址
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