| 摘要 |
PURPOSE:To improve the adhesive powder, density and vapor deposition speed of a film by projecting a laser beam again to an evaporating material at the time of projecting the laser beam to the target material to evaporate the target material and to form the film. CONSTITUTION:A laser beam 7b which is included in an incident laser beam 7 and is transmitted through a partial reflection mirror 9 is reflected by a total reflection mirror 10 to enter the inside of a chamber 1 in which a vacuum state is maintained. The target material 5 is irradiated with said beam. The target material 5 is directly evaporated by the irradiation and the evaporating material 6 is fed to a base material 3. On the other hand, the laser beam 7a reflected by the partial reflection mirror 9 passes the transparent window 8a of the chamber 1 and enters the inside of the chamber 1 where the evaporating material 6 is irradiated by said beam. Since the evaporating material 6 is pulverized at the time of the irradiation, the material absorbs the energy possessed by the laser beam 7a with high efficiency, by which the ionization degree, etc., of the evaporating material 6 are improved and the activity thereof is improved. The evaporating material 6 improved in the activity sticks onto the surface of the base material 3 to form the film 4. |
