| 摘要 |
PURPOSE:To improve laser beam machining accuracy by providing a zoom optical system and intensity controller for laser light and driving a variable aperture, zoom optical system and intensity controller in synchronization. CONSTITUTION:The intensity controller 14 to adjust the total energy of the laser light L11 generated by a laser light generator 15 is provided and the zoom optical system 13 to adjust the optical diameter of the laser light L12 which is the output thereof is disposed. A laser light diameter detector 26, a zoom optical system driving mechanism 25, a variable aperture driving mechanism 23, etc., are respectively connected to a control circuit 21. The driving mechanisms 23, 25 and the controller 14 are controlled in synchronization by the above-mentioned mechanism so as to form the laser light L14 having the laser light diameter/aperture diameter ratio, adequate processing region and sectional intensity distribution present in the circuit 21. Since the machining is executed always by the adequate laser light L14, the laser beam machining accuracy is improved. |
