Method for forming a hard carbon thin film on article and applications thereof

摘要

A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atmosphere of catalystic gas, for instance, H2+Ar or H2 of about 10-4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP2 bond and hybridized orbital SP3 bond and crystalline carbon particles of hybridized orbital SP3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP2 bond and hybridized orbital SP3 bond.