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发明名称
Wafer handling arm
摘要
申请公布号
GB2193482(A)
申请公布日期
1988.02.10
申请号
GB19870009595
申请日期
1987.04.23
申请人
* VARIAN ASSOCIATES INC
发明人
RICHARD S * WEINBERG
分类号
B25J9/00;B65G49/07;H01L21/677;(IPC1-7):B25J18/02
主分类号
B25J9/00
代理机构
代理人
主权项
地址
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