发明名称 |
GENOM KATODFOERSTOFFNING ERHAOLLNA TRANSPARENTA BELAEGGNINGAR. |
摘要 |
A method for depositing a protective coating by cathode sputtering of an alloy of aluminium and silicon in a reactive gas is disclosed. The sputtering target contains sufficient silicon to produce an amorphous coating; 6 to 18 percent silicon is preferred. Targets of approximately 88% aluminium and 12% silicon are especially preferred. Oxygen, nitrogen, compounds of oxygen and compounds of nitrogen are preferred reactive gases. A range of combinations of oxygen and nitrogen are particularly preferred. The method provides durable transparent coatings which may be used as an overcoating for a metal or dielectric coating to provide increased resistance to abrasion and corrosion. In particular, the protected coating may be a metal, dielectric or dielectric-metal-dielectric coating as used in double-glazed window units for buildings or vehicles. |
申请公布号 |
FI880451(A0) |
申请公布日期 |
1988.02.01 |
申请号 |
FI19880000451 |
申请日期 |
1988.02.01 |
申请人 |
THE BOC GROUP, INC. |
发明人 |
BELKIND, ABRAHAM I.;BJORNARD, ERIK;HOFMAN, JAMES J.;JACOBSON, DONALD V.;NADEL, STEVEN J. |
分类号 |
C23C14/14;C03C17/22;C03C17/245;C03C17/34;C03C17/36;C23C14/08;C23C14/10;C23C14/34;(IPC1-7):C03C/ |
主分类号 |
C23C14/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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