FORMATION OF ORIENTING RESIST AND PATTERN

摘要

PURPOSE:To improve an image contrast by orienting crystal which is soluble in or reactive to water as organic material crystal at right angles to a substrate. CONSTITUTION:Ester-based liquid crystal which is high polymer liquid crystal reactive to and soluble in water is used as an organic high polymer crystal material and 4-azitochalcone is introduced as a photosensitive group in the high polymer crystal by a proper means. The ester-based liquid crystal is cyanophenyl ester-based liquid crystal, etc. This ester-based liquid crystal 12 is mixed with a proper volatile solvent to obtain proper viscosity and applied by one micron over a semiconductor substrate 11 and the solvent is vaporized at proper temperature after the application to leave the liquid crystal' and an electric or magnetic field is applied to orient the liquid crystal. This oriented and applied liquid crystal is irradiated with an ultraviolet ray or electron beam 13 to make photosensitive groups at the irradiated part 12A react, and thus the molecular weight of a high polymer to form a latent image in liquid crystal resist. Consequently, a resist pattern with a high contrast is formed.