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发明名称
DRY ETCHING APPARATUS
摘要
申请公布号
JPS6312139(A)
申请公布日期
1988.01.19
申请号
JP19860156547
申请日期
1986.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
SUDO KOJI;TSUBOUCHI JIRO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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