| 摘要 |
PURPOSE:To prevent a raw material solution in a piping from breaking an air-actuated valve, etc., and from going into a raw material feeder or a solution supply device, by setting a solution reservoir to absorb pressure variation of raw material solution in piping caused by variability of circumferential temperature in a solution supply piping connecting the solution supply device to the raw material feeder. CONSTITUTION:A raw material solution 2 in a solution supply device 1 is sent through a piping 3 equipped with an air-actuated valve 4 by gas pressure to a raw material feeder 10 through pipings 5, 7 and 9 provided with air-actuated valves 6 and 8. A raw material solution 11 such as SiCl4, etc., which is heated by a heater 18 in the raw material feeder 10 and made into desired vapor pressure is vaporized by a carrier gas which is introduced through a piping 15 equipped with a gas flowmeter 17, an air-actuated valve 16, etc., and fed from a piping 12 equipped with an air-actuated valve 13 to an optical fiber production device (not shown in the figure). The solution supply piping 7 is connected through a piping 19 to a solution reservoir 20, an inert gas is packed through a piping 21 equipped with an air-actuated valve 22 into the solution reservoir and desired pressure is kept. |
