发明名称 BONDING APPARATUS
摘要 PURPOSE:To prevent defective operation of a bonding apparatus due to noises, by shielding, with a shielding plate, the noises such as electromagnetic noises, which are imparted to a control part, a control power source and the like from a driver part, a driver power source and the like in an electric equipment box. CONSTITUTION:In an electric equipment box 4, a shield plate 7 is provided so as to divide the inside of the box into an upper storing chamber 5 and a lower storing chamber 6. The shield plate 7 has the property of shielding electromagnetic noises and the like between the upper storing chamber 5 and the lower storing chamber 6. A control unit 10 is stored in the upper storing chamber 5. A driver unit 13, which receives a signal from the control unit 10, is stored in the lower storing chamber 6. Thus, the electromagnetic noises and the like generated by the driver unit 13 are shielded by the shield plate 7, and the effects on the control unit 10 can be prevented.
申请公布号 JPS637642(A) 申请公布日期 1988.01.13
申请号 JP19860150844 申请日期 1986.06.27
申请人 TOSHIBA CORP 发明人 SUEMATSU MUTSUMI
分类号 H01L21/52;H01L21/60 主分类号 H01L21/52
代理机构 代理人
主权项
地址