| 摘要 |
PURPOSE:To obtain an iron nitride magnetic material having Fe16N2 as a main component by a method wherein Fe is evaporated and ionized using a hollow cathode gun, and an iron nitride is formed on a substrate using an N2 ion beam. CONSTITUTION:The Fe3 in a crucible is evaporated and ionized using a hollow cathode gun 1, and an Fe thin film is formed on a polyethylene film 8. At the same time, an iron nitride thin film is formed by projecting an N2 ion beam from an ion source 4. If the hollow cathode gun 1 is used, the rate of ionization of an Fe vapor 6 can be raised as high as to 40-60%, and the main component of the iron nitride is turned into Fe16N2. As a result, the iron nitride having high saturation magnetization and excellent corrosion-resisting property can be obtained. |
