ANTIFOGGING METHOD FOR PEEP WINDOW PART OF PLASMA VAPOR REACTION DEVICE AND PLASMA VAPOR REACTION DEVICE

摘要

PURPOSE:To effectively prevent or suppress the fogging of an insulated peep window part by impressing the voltage lower than impressed voltage to an anode side in the same phase to the peep window part. CONSTITUTION:The voltage lower than the voltage impressed to an anode side electrode 30 from a high-frequency power source 32 is adjusted to the same phase as the phase of the anode by a capacitor 60 and is impressed from the same power source 32 to the peep window part 50 of a light transmittable insulating member disposed to the side wall surface of a reaction chamber 1. The peep window part 50 is thereby made to have the same phase as the phase of the anode side and since the voltage is lower than the anode side voltage, a plasma region is concentrated to the cathode side, by which the fogging of the peep window part 50 is prevented or suppressed. The capacitor 60 is a phase advance capacitor and the voltage to be impressed on the peep window part 50 is about 10-50% of the voltage to be impressed on the anode. The above-mentioned light transmittable member is preferably of quartz glass.