| 摘要 |
PURPOSE:To recover and recirculate a coating solution in a clean state and to simplify a rotary mechanism, by applying the coating solution to a coating surface in such a state that the coating surface of a base material is not turned upwardly above a vertical surface. CONSTITUTION:The disc 2 held by a rotary holding stand 1 and rotated at a predetermined rotational speed by said stand 1 is fed into a spin-coater tank 14 as shown by an arrow and the coating surface 2a of the disc 2 is properly contacted with the fountain-shaped top part of a coating solution at a solid line position to apply the coating solution to the almost entire area of the coating surface 2a. Subsequently, when the disc 1 is allowed to rise to an alternate long and short dash line position, the excessive part of the applied coating solution is scattered from the outer edge part of the disc 2 by the rotation of the disc 2 to adhered to the inner surface of the tank 14. Most of the unapplied coating solution flows down to a receiving tray part 15 as it is and is returned to a liquid tank 13 to be recirculated. |
