| 摘要 |
PURPOSE:To reduce the size of a housing and to obtain a detector which is easily manufactured and has superior pressure reception sensitivity by making part of the side wall of a sensing body thin to form a pressure receiving diaphragm, and joining a strain gauge element with its internal flank. CONSTITUTION:This detector has a cylindrical housing 2 and in the opening of its tip part facing the inside of a pressure chamber, a cylindrical sensing body 1 made of ceramic having its tip closed is held airtightly. Further, part of the side wall of the sensing body 1 is made thin to form a pressure receiving diaphragm 13 and a strain gauge element 4 is joined with and fixed on its internal flank. The diaphragm 13 is arranged in parallel to the axis of the housing 2, so even when its pressure reception area is increased and the size is made large to improve the pressure reception sensitivity, the diameter of the housing 2 need not be increased, the detector is made compact on the whole, and there is not any problem such as deterioration in sealing performance due to the expansion of the fitting opening. Further, the sensing body 1 and diaphragm 13 are molded integrally of ceramic, so the trouble in the high- accuracy working of the sensing body is not necessary. |
