| 摘要 |
PURPOSE:To operate a substrate holder without causing a delay and an error transmission by a mechanism wherein, when a shaft is driven in the axial direction from the outside of a vacuum chamber, a rack is moved to press a pinion gear against a spiral spring and to rotate it. CONSTITUTION:A vacuum-side shaft 5 of a rotary introducing machine 4 engages with an extension shaft 6 elastically in the axial direction, and the shaft 6 is supported rotatably by bearings 7a and 7b, at the portions near the respective ends. To one end of this shaft 6, a small bevel gear 8 is fixed so that it supports rotatably a large bevel gear 14 engaging therewith. Moreover, a pinion gear 15 is fixed to one end of a support member 11 supported rotatably by bearings 10a and 10b, and one end of a rack 16 engaging with said gear is joined to a shaft 20, which is coupled to the outside of a vacuum chamber through the intermediary of a bellows 22. Since an initial torque larger than the maximum value of a rotational torque is given herein to a spiral spring 23 by the own weight of a substrate holder, the rack 16 is moved when the shaft 20 is driven in the axial direction from the outside of the chamber, and thereby the gear 15 is rotated while being pressed against the spring 23, so as to rotate the member normally.
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