| 摘要 |
PURPOSE:To substantially decrease intervals between monitoring operations for improving the monitoring accuracy, by temporarily storing data collected during working of a wafer in a main memory and restoring the data in an auxiliary memory during transportation of the wafer when the wafer working process is interrupted. CONSTITUTION:A monitor data is fetched from a wafer dry etching device 1 into a computer 2 having a main memory 21 and an auxiliary memory 5. The data is displayed by a CRT 4 according to a monitor instruction given from a key board 3. Data monitored during working of a wafer is stored by the memory 21 instead of the memory 5 because the memory 21 can operate more rapidly than the memory 5, and the data stored in the memory 21 is restored in the memory 5 during transportation of the wafer. In this manner, intervals between monitoring operations can be decreased substantially and, therefore, the monitoring accuracy can be improved.
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