| 摘要 |
PURPOSE:To equivalently reduce the effect of gas pressure pulse on laser output by slipping off the timing of discharge gas by a method wherein the positions of a plurality of rotary blades of blowers to be turned are slipped off with one another. CONSTITUTION:The rotary phases of rotary blades 25a, 25b and 26a, 26b are slipped off with one another by 45 degrees so that, when the rotary blades 25a, 25b and 26a, 26b are simultaneously turned by a driving motor 21 to circulate any enclosed gas laser medium, the discharge timing from blowers 22a, 22b are slipped off resultantly. In other words, the gas laser medium to be at the fluctuated gas pressure of X is fed from the blower 22a side to a gas discharge tube 3 through a heat exchanger 23b and a feed pipe 4a while the gas laser medium to be at the fluctuated gas pressure of Y with slipped off timing by 45 degrees from the fluctuated gas pressure of X is fed from the blower 22b side to the gas discharge tube 3 through another heat exchanger 24b and another feed pipe 4b. Through these procedures, the effect of gas pressure pulse on laser output can be equivalently reduced, thus diminishing the output fluctuation width. |
