发明名称 METHOD AND DEVICE FOR MEASURING NONCONTACT SHAPE OF CONVEX LENS
摘要 PURPOSE:To accurately measure the shape of even an aspherical lens with high efficiency without contacting by moving a scanning surface while making a scan in the gap between the reference line of a reference measurement body and the convex lens to be measured. CONSTITUTION:A laser beam 42 from a laser tube 40 is converted by a rotary polygon mirror 46 into a rotary scanning beam 47, which is further converted by a collimator lens 48 into a parallel scanning beam 50; and the beam scans on the body to be measured which is arranged between the collimator lens 48 and a condenser lens 52 at a high speed and the scanning-directional size of the body to be measured is measured from the time length between a dark and a light part formed by the body to be measured at this time. At this time, a lens holding means 20 is moved by a moving means 22 in an X direction along with the reference measurement body 16 and the Y-directional distance of the gap 19 is measured simultaneously to obtain the X and Y coordinates of the external form line 18A of the section of the convex lens 18 to be measured.
申请公布号 JPS62265550(A) 申请公布日期 1987.11.18
申请号 JP19860109077 申请日期 1986.05.13
申请人 MITSUTOYO CORP 发明人 KUWABARA YOSHIHARU;SUZUKI MASAMICHI;TOMITANI MASAKI
分类号 G01B11/24;G01M11/00 主分类号 G01B11/24
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