| 摘要 |
PURPOSE:To obtain a sensor reduced in the variation in zero output or temp. drift, by integrally forming the arm parts and base part of a tuning fork-shaped vibrator by the same piezoelectric body and adhering an exciting piezoelectric body to the side surfaces of both arm parts. CONSTITUTION:AC voltage is applied between the electrodes 1a, 1b and electrodes 1'a, 1'b of drive parts 1, 1' each comprising a piezoelectric body adhered to the piezoelectric bimorph detection parts 2, 2' of a tuning fork-shaped vibrator 3 through conductors 4, 4'. The vibrator 3 vibrates in a X-X' direction by the extension and contraction of the drive parts 1, 1'. If there is angular velocity OMEGA around a Z-axis, Coriolis force acts in a Y-Y' direction and the detection parts 2, 2' perform bending vibration in the Y-Y' direction. By this mechanism, AC voltage proportional to the angular velocity OMEGA is generated in the conductors 5, 5' connected to the detection part 2, 2' and the angular velocity can be measured. Because this sensor is integrally formed of the piezoelectric body of the same material, a structure is made simple and the variation in zero output or temp. drift is reduced. |
