| 摘要 |
PURPOSE:To make spectral measurement with good S/N without spectral deformation by providing luminance modulation to an ion beam to be irradiated on a sample. CONSTITUTION:An ion ray is generated from an ion gun 1. A chopper 3 is provided between the gun 1 and the sample 2 and the chopper 3 is rotated by a motor 4, by which the luminance modulation is applied to the ion ray. The modulation frequency can be varied by the rotating speed of the motor 4. The Auger electrons generated from the sample 2 are analyzed by, for example, a cylindrical mirror type electron energy analyzer (CMA) 5. A DC sweep voltage made by a Ramp power source 6 is kept impressed to the electrode of the CMA 5. The output of the CMA 5 is detected by an electron amplifier 7 and is inputted to a lock in amplifier 9 after amplification with a preamplifier 8. The sine wave of the same frequency as the luminance modulation frequency is inputted as a reference signal of the amplifier 9. The output of the amplifier 9 is, for example, recorded 10. The spectral measurement with the good S/N is thus made without the deformation of the spectra. |
