PROCEDES POUR APPLIQUER SIMULTANEMENT SUR UNE PLURALITE DE PLAQUETTES DE CIRCUITS INTEGRES UNE PELLICULE PHOTOSENSIBLE D'EPAISSEUR UNIFORME EN VERRE DE SELENIURE DE GERMANIUM OU D'ARSENIC SENSIBILISE PAR UN SEL D'ARGENT

摘要

The invention relates to methods for applying simultaneously on a plurality of integrated circuit boards a photosensitive film having a uniform thickness of arsenic or gemanium selenide glass sensitized by a silver salt. A device according to the invention comprises a reactor (1) for chemical deposition vapour phase assisted by plasma which is connected to a vacuum pump (4) and to a gas distribution panel (6) which is connected to bottles (7, 8, 9) containing respectively nitrogen, selenized hydrogen and germane. The reactor (1) comprises a carriage (13) carrying pairs of graphite plates (15a, 15b) which are connected to an oscillating voltage generator (17). The silicon wafers (18) are placed against the electrodes (15a, 15b). An application is the fabrication of complex integrated circuits.