发明名称 FILM THICKNESS MEASUREMENT OF NON-ELECTROLYTICALLY PLATED LAYER
摘要 PURPOSE:To measure film thickness of an electrolytically plated layer continuously and easily with high accuracy, by converting into the film thickness a change of a value of electric resistance of a conductive member established in the same non-electrolitic plating environment as an electrolytically-plated part. CONSTITUTION:A metallic wire W is pinched at a top portion to a clamp 7 made of teflon, etc. located in a bucket frame 6 through an insulating sheath 8 such as a vinyl tube. A metallic-wire monitor is put in the same environment as a substrate during the course of the non-electrolytic plating and undergoes the same treatment process as the substrate. After immersion of a bucket 1 in electrolytic-plating solution, a clip 11 is placed between both ends of the metallic wire and thus, a change in the value of electric resistance of the metallic wire occompanying depositing of plated material thereafter can be identified continuously.
申请公布号 JPS62206401(A) 申请公布日期 1987.09.10
申请号 JP19860047258 申请日期 1986.03.06
申请人 NIPPON MINING CO LTD 发明人 ITO KATSUTO;OKUBO RIICHI
分类号 G01B7/06;C23C18/16;C23C18/31;C23C18/34;C23C18/40;C23C18/44 主分类号 G01B7/06
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