| 摘要 |
PURPOSE:To obtain the titled member having stable electrical, optical and photoconductive properties, and having excellent anti-light fatigue, durability and anti-moisture prperties and a less tendency for generating a residual potential by forming the light receiving layer contg. a layer of hindering electrostatic charge injection, a photoconductive layer and a surface layer which are composed of a prescribed material on a substrate body. CONSTITUTION:The light receiving layer 100 contg. the layer of hindering electrostatic charge injection 102, the photoconductive layer 103, the surface layer 104 and the free surface 105 is formed on the substrate 101. The layer of hindering electrostatic charge injection 102 is composed of a polycrystalline material contg. Si atom as a mother body, and contains substance capable of controlling a conductive property such as groups III and V elements or its compds. and may contain oxygen or nitrogen atom. This layer 102 is composed of the polycrystal material which is formed by introducing a precursor for forming the layer and an active species capable of chemically interacting with the precursor into a film-forming space separately, and by subjecting to chemical reaction. The layer 103 is composed of a-Si:H, X (an halogen atom). The layer 104 is composed of a non-crystalline material contg. Si, C and H atoms. |
