| 摘要 |
PURPOSE:To enhance cleaning effect due to air blow in a simple mechanism by acting shock wave or pressure wave on gas introduced into a vacuum treatment tank and flying up dust particles and discharging these together with gas. CONSTITUTION:An air supply passage 6 is connected to one side of a vacuum treatment tank 1 and an exhaust passage 7 is connected to the other side. Air of the outside is conducted to the exhaust passage 7 via the inside of the treatment tank 1 through the air supply passage 6 by means of the actuation of a blower 4. At this time, a generating source 11 of shock wave or pressure wave is actuated intermittently or continuously, and generated shock wave or pressure wave acts on the air incorporated in the treatment tank 1. In such a case that a boundary layer is present in the neighborhood of a wall surface, shock wave or pressure wave breaks it and acts on dust of the inside thereof and dust is flown up. The dust flown up is accompanied with the air and discharged to the outside through the exhaust passage 7.
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