| 摘要 |
PURPOSE:To observe an image of three-dimensions in real time, by displaying the image on a display unit with an afterglow property responding to two incident angles at which the deflected particle beam probes deflected by locking deflectors radiate a sample, and observing it three-dimensionally with a stereoscope. CONSTITUTION:Depending on a locking signal from a stereoscopic signal control 8, locking coils 5-1 and 5-2 deflect the incident direction of an electron beam probe to be radiated to a sample, to X(Y) shown in the figure, for example. In such a deflected condition, a deflecting coil 4 scans over the sample 6 with electron beam probes formed thinly depending on the deflected signal fed from a scanning signal generator 7. Synchronously to the scanning, the secondary electrons produced at the sample 6 are collected and displayed on the screen of a display unit 12-1 (12-2). By observing the two images displayed, with a stereoscope 13, the sample 6 can be observed three-dimensionally in real time.
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